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 Click to enlarge image
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 Model Number |
iA Series |
Overview
Arc System is an ion plating system for a hard thin film coating of for the
a substrate by using the Arc discharge on the target and by applying the cathode
BIAS voltage.
Features
Combination of special shape and magnetic structure for decreasing of macro
particles Excellent adhesion with IEGD ( Ion Enhanced Glow Discharge ) method
- Above 90% ionization
- High energy ion plating (60-100eV)
- High adhesion
Arc >> Sputter >> E/B
- Decrease of macro particle
- Hybrid method of using ion bombardment
- Jig : movable cart with rotation unit
- Auto process and compiling database
Basic Specification
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Classification
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i500A
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i700A
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i800A
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i1200A
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Chamber Size
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500 x 500 x 500
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700 x 700 x 700
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900 x 900 x 900
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1200 x 1200 x 1200
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Source Size
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3" Circular
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5" Circular
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5" Circular
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5" Circular
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Arc P/S
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10kW
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10kW
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10kW
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10kW
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Source Q'ty
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4 sets
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4 sets
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6 sets
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8 sets
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Bias P/S
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12kW
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12kW
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18kW
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18kW
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HCD P/S
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20kW
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Heater
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10kW
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20kW
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40kW
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40kW
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Electricity
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220V x 100A x 3P
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220V x 100A x 3P
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220V x 300A x 3P
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220V x 400A x 3P
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Comp. Air
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5 ~ 8Kgf/cm2
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Cooling Water
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2.5 ~ 3Kgf/cm2, 18 ~ 25°C, Distilled Water
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Process Gas
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99.999% Pure Gas
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Heating Control
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Selecting the capacity according to the choice of user,
PID control
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System Ground
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Class-1 grounding or its relevant facility
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System Control
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PC and PLC Control
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Remarks
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Above specifications are our standards and they can
be adjustable from user's request
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Applicable Areas
- CrN coatings for automobile parts
- Decorative hard coatings
- Hard coating for electronic applications
- Hard coating for cuttings tools and molds
Diagram of iA Series
Lay-out of i800A
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