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 Model Number |
ILS Series |
Feature
Heating, Etching, Process, Buffer and Unloading chamber
Applicable areas : Glass and acrylic sheet of ITO, Al, Cr, TiO2/SiO2, MgO, Etc
Using MSS type or AIP type
- Suitable for large sized glass and sheet
- High productivity and reliability
- Full auto process
- Compiling database for each chamber
- High yield target erosion (40%)
- Large sized plasma cleaning system
Specification
| Classificationl |
ILS-740 |
ILS-920 |
ILS-1460 |
ILS-1720 |
| Chamber Size |
740H x 270W |
920H x 240W |
1460H x 340W |
1720H x 360W |
| Sourc |
20" x 3.5" |
25" x 5" |
44" x 5" |
56" x 5" |
| Power Supply |
DC, RF, Pulse Etc. |
| Source Q'ty |
Userable |
| Electricity |
220V x 60Hz x 3P X 4 Wires |
| Comp. Air |
5 ~ 8 Kgf/cm2 |
| Cooling Water |
2.5 ~ 3Kgf/cm2, 18 ~ 25°C, Distilled Water |
| Process Gas |
99.999% Pure Gas |
| Heating Control |
Selecting the capacity according to the choice of used, PID control |
| System Ground |
Class-1 grounding or its relevant facility |
| System Control |
PC and PLC Control |
| Remarks |
Above specifications are our standards and they can be adjustable from user's request
(Max Size : 5" x 56" Target) |
Flowchart of ILS Series
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