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 Model Number |
MSS Series |
Overview
Magnetron Sputtering System is an equipment used in coating of a thin-film
on the substrate by forcing the atoms to bounce out and accelerating it from
the collisions of high-energy ions on the target surface.
Features
UBM Type : Suitable coating for metal, ceramic, lubrication, EMI and insulation
Excellent adhesion with IEGD ( Ion Enhanced Glow Discharge ) method
- Long distance coating with UBM mode
- Very smooth surface
- Fine, High density films
- High yield target erosion (40%)
- Almost all the materials can be used for coating
- Hybrid system (UBM + Arc or UBM + HCD)
- Auto process in every step
Specification
| Classification |
MSS-500
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MSS-700
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MSS-800
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MSS-1200
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| Chamber Size |
500 x 500 x 500
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700 x 700 x 700
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900 x 900 x 900
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1200 x 1200 x 1200
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| Source Size |
15" x 5" Rec.
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20" x 5" Rec.
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25" x 5" Rec.
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40" x 5" Rec.
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| Sputter P/S |
10kW
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16kW
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16kW
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24kW
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| SourceQ'ty |
2 Sets
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2 Sets
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2 Sets
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2 Sets
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| Bias P/S |
3kW
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4.8kW
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4.8kW
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7.8kW
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| Heater |
10Kw
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20Kw
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40Kw
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40Kw
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| Electricity |
220V x 100A x 3P
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220V x 150A x 3P
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220V x 300A x 3P
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220V x 400A x 3P
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| Comp. Air |
5 ~ 8Kgf/cm2
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| Cooling Water |
2.5 ~ 3Kgf/cm2, 18 ~ 25°C, Distilled Water
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| Process Gas |
99.999% Pure Gas
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| Heating Control |
Selecting the capacity according to the choice of used,
PID control
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| System Ground |
Class-1 grounding or its relevant facility
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| System Control |
PC and PLC Control
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| Remarks |
Above specifications are our standards and they can
be adjustable from user's request
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Applicable Areas
- DLC, MoS 2 , TiAl(Metal), TiAlN, TiCN, TiN, CrN Hard coating system
Diagram of MSS Series
Lay-out of MSS-800
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