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7G Gate Door Valve
Specification and distinctive features
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- Product operates by pneumatic control (From ATM to VAC)
- Protect exposing the particle with separated movement and lubrication from the working area
- Possible to make a non-standard size
- High sealing reliability
- Application : Common industrial, LCD and PDP line, etc.
- Leak rate is better than 2 x 10-9 scc/sec
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Dimension Data
| Part No./Size |
A |
B |
C |
D |
E |
F |
| ISYS-GD-01 |
2700 |
540 |
202 |
1970 |
120 |
750 |
The above table figures can be changed for the improvement of product performance.
The Size of flange may be adjusted from the request of user.
Outline Drawing
Rectangular Gate Valve
Specification and distinctive features
 |
- Lighter than competitor's valve of same size
- Easy maintenance and small vibration
- Possible to make a non-standard size
- Using of forward and backward pressure
- Leak rate is better than 2 x 10-9 scc/sec
- Long life time : More than 1,000,000 times
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Dimension Data
| Part No./Size |
A |
B |
C |
D |
E |
F |
G |
| ISYS-G-01 |
167.5 |
432.5 |
304 |
114 |
800 |
609 |
110 |
| ISYS-G-02 |
280 |
816 |
662 |
340 |
1120 |
880 |
120 |
| ISYS-G-03 |
270 |
590 |
845 |
280 |
1580 |
1430 |
130 |
| ISYS-G-04 |
255 |
545 |
599 |
250 |
2101 |
1900 |
130 |
| ISYS-G-05 |
230 |
500 |
550 |
200 |
2340 |
2120 |
130 |
| 2" x 10" |
75 |
145 |
180 |
51 |
395 |
254 |
80 |
| 3" x 12" |
90 |
160 |
190 |
76 |
445 |
305 |
80 |
The above table figures can be changed for the improvement of product performance
The size of flange may be adjusted from the request of user.
Outline Drawing
Circular Valve
Specification and distinctive features
 |
- Lighter than competitor's valve of same size
- Easy maintenance and low vibration
- Possible to make non-standard size
- Using both forward and backward pressure
- Leak rate is better than 2 x 10-9 scc/sec
- Long life time : More than 1,000,000 times
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Dimension Data
| Part No./ Size |
A |
B |
C |
D |
E |
F |
G |
| ISYS RG01 |
145 |
241.3 |
279.4 |
420 |
430 |
80 |
990 |
| ISYS RG02 |
261 |
320 |
350 |
500 |
490 |
90 |
1165 |
| ISYS RG03 |
300 |
370 |
406 |
565 |
540 |
100 |
1310 |
| ISYS RG04 |
400 |
480 |
510 |
720 |
650 |
130 |
1625 |
The above table figures can be changed for the improvement of product performance.
The size of flange may be adjusted from the request of user.
Outline drawing
Throttle Valve
Specification and distinctive features
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- Reduced thickness for non interference with other parts (Small-sized and light-weighed products)
- Rapid respond velocity
- Manual, pneumatic and full auto control
- Possible to make a non-standard size
- Application : PVD system
- Leak rate is better than 2 x 10-9 scc/sec
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Dimension Data
| Part No./ Size |
A |
B |
C |
D |
E |
| ATV-12 |
406.4 |
362 |
203.2 |
541.6 |
60 |
| ATV-10 |
335 |
310 |
304.1 |
471.6 |
60 |
| ATV-8 |
279.4 |
241.3 |
276.3 |
416 |
60 |
| ATV-6 |
228.6 |
190.5 |
250.9 |
365.2 |
60 |
The above table figures can be changed for the improvement of product performance.
The size of flange may be adjusted from the request of user.
Outline Drawing
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